Münchner Physik-Kolloquium
Pic: Zeiss.de
📅 Monday, 26 June 2023, 17:15
📌 Hörsaal H 030, Fakultät für Physik der LMU, Schellingstraße 4, München
about
“Nano-Lithography – the smaller the bigger”
by
Dr. Andreas Dorsel
Carl Zeiss SMT
Abstract:
After a cursory glimpse on the historical foundations of microlithography, this talk will provide you with a solid notion of what can be achieved in nano lithography today and what the present technical limitations are and what may end up being practical or fundamental boundaries of will be possible in the future. Carl Zeiss SMT has been working on lithography optics for more than 50 years and has lived through many of the technological milestones from the early beginnings of integrated circuits to present-day extreme integration using EUV and allowing qualitatively new applications of micro- or rather nano-electronics. While the technologies involved are more than can be covered in a single seminar, you will get an overview of a wide range of technical aspects that have to be addressed in order to succeed and how we are doing in addressing them. A status update on the latest HiNA EUV optics will be included.